CMP
CMP is a process that flattens the surface of a semiconductor wafer by implementation of
chemical etching method and mechanical polishing simultaneously.
TSC directly develops or repairs components and materials of CMP facilities
chemical etching method and mechanical polishing simultaneously.
TSC directly develops or repairs components and materials of CMP facilities
TSC Rotary Joint
| Category | Develoed Product |
|---|---|
| Application | EBARA FREX300 |
| Feature | OVERHAUL |
| Explanation | – New production – TSC Test system |
FSB
| Category | Develoed Product |
|---|---|
| Application | All FAB |
| Feature | Facility Supply Box |
| Explanation | – New production – Installed in the FAB |
RR VISION
| Category | Develoed Product |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | This system is developed to detect scratches occurred by the impurities during the CMP process. The system detects scratches found on the Retainer Ring. |
| Explanation | – New production – Facility Supply Box – Installed in the FAB |
Brush VISION
| Category | Develoed Product |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | Brush Gap Check Tool |
| Explanation | New production |
Temp Monitoring
| Category | Develoed Product |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | Temp monitoring to equipment |
| Explanation | New production |
Conditioner Head
| Category | Repair |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | OVERHAUL |
| Explanation | – Main Part’s Replacement – TSC Test system |
Arm Base
| Category | Repair |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | OVERHAUL |
| Explanation | – Main Part’s Replacement – TSC Test system |
Spindle
| Category | Repair |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | – Main Part’s Replacement – TSC Test system |
| Explanation | – New production – Facility Supply Box – Installed in the FAB |
Rotary Joint
| Category | Repair |
|---|---|
| Application | EBARA FREX300 |
| Feature | OVERHAUL |
| Explanation | – Main Part’s Replacement – TSC Test system |
UPA(MKS BOX)
| Category | Repair |
|---|---|
| Application | AMAT LK, REFLXION |
| Feature | OVERHAUL |
| Explanation | – Main Part’s Replacement – TSC Test system |